![]() On the contrary, parallel-kinematics mechanism can overcome the aforementioned shortages. The different dynamic features in the two working axes cause another problem. Such design approach induces some problems in terms of high inertia, large cumulative errors, and low resonant frequency. In earlier work, majority of existing designs use the serial-kinematics scheme. There are two schemes which can achieve the two-dimensional motion, namely, serial-kinematics scheme and parallel-kinematics scheme. ![]() In practice, the two-dimensional XY motion stages exhibit a wide application. The structure parameters of a compliant mechanism should ensure that it works in elastic domain and induces no plastic deformation. A typical compliant mechanism is a monolithic piece of a material, which works relying on the deflection of its flexible members. To overcome the shortages of conventional technologies, flexure-based compliant mechanisms have been extensively exploited owing to their significant advantages, such as no wear, no backlash, and no friction, low cost, and vacuum compatibility. Conventional technologies, which are based on servomotors, ball screws, and rigid linkages, struggle to achieve high position accuracy because of the adverse effects of backlash, friction, and wear. Micro-/nanopositioning techniques are playing an increasingly important role in precision engineering applications, such as scanning probe microscopy, cell microinjection, and precision alignment. Moreover, sensitivity analysis results indicate that the machining errors of the in-plane width and inclined angle of the bistable beams are the main reasons which cause the discrepancy between simulation and experimental results. Multiple motion tests reveal that the stage has less than ☑ N float of the constant force. The stage possesses a good motion repeatability, which indicates a hysteresis width lower than 1.5% of the maximum force. Results show that the developed stage delivers a constant force of 29 N and a constant-force motion range of 700 μm along with less than 1% motion coupling in each working axis. A prototype stage is fabricated for experimental studies. The structure parameters are designed for the requirements of range, stiffness, and payload capabilities. An analytical model of the stage is established and verified by conducting finite-element analysis. By combining the bistable beams and positive-stiffness leaf flexures, a zero-stiffness mechanism is devised. Its uniqueness lies in the reduction of driving force for achieving a large stroke output and the realization of a constant force output without using a force controller. This paper presents the design of a new flexure-based XY precision positioning stage with constant force output.
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